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flow pattern defect中文是什么意思

  • 流体图案缺陷

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  • The study results obtained by afm suggest that the flow pattern defects were revealed as having wedge shape and there were small octahedron voids surrounded by { 111 } which were the same as cops and lstds planes were observed at the tips of flow pattern defects
    用原子力显微镜对fpds结构的研究结果表明, fpds缺陷形如抛物线,并且在其端部存在有和cops 、 lstds缺陷相同的由{ 111 }面构成的八面体空洞。
  • In this paper , the flow pattern defects ( fpds ) were revealed by secco etchant and their shape , distribution on wafer and tip structure were studied in details by optical microscope and atomic force microscope ( afm ) . the relationship between etching time and the tip structure of fpds was also discussed . furthermore , by studying the effect of rapid thermal annealing ( rta ) on the density of fpds in ar , the annihilation mechanism of fpds was discussed in this paper
    本文将cz硅单晶片在secco腐蚀液中择优腐蚀后,用光学显微镜和原子力显微镜对流动图形缺陷( flowpatterndefects , fpds )在硅片中的形态、分布及其端部的微观结构进行了仔细地观察和研究,并讨论了腐蚀时间对fpds缺陷端部结构的影响;本文还通过研究ar气氛下快速退火( rapidthermalannealing , rta )对fpds缺陷密度的影响,初步探讨了fpds的消除机理。
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